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Study and Improvement on Tungsten Plug Corrosion in CMP Process for PCRAM

Type: Journal Paper

Author : Ying Li; Zhitang Song; Bo Liu; Guanping Wu; Songlin Feng

Publisher: IEEE

Year: 2014

Cost-Effective Schottky-Barrier Diode Array With Ni–Silicidation Accessing Low Power Phase-Change Memory

Type: Journal Paper

Author : Yan Liu; Chao Zhang; Zhitang Song; Bo Liu; Guanping Wu; Jia Xu; Lianhong Wang; Lei Wang; Zuoya Yang; Songlin Feng

Publisher: IEEE

Year: 2014

Improvement of retention and endurance characteristics of Si nanocrystal nonvolatile memory device

Type: Conference Paper

Author : Jie Yu; Zhongyuan Ma; Yuefei Wang; Sheng Ren; Zhonghui Fang; Xinfan Huang; Kunji Chen; Guanping Wu; Yongxing Zhang; Lingling Wang

Publisher: IEEE

Year: 2014

Author

Guanping Wu (3)

Bo Liu (2)

Songlin Feng (2)

Zhitang Song (2)

Chao Zhang (1)

Jia Xu (1)

Jie Yu (1)

Kunji Chen (1)

Lei Wang (1)

Lianhong Wang (1)

Publisher

IEEE (3)

Year

2014 (3)

Keywords

phase change memories (2)

acidic buff slurry effect (1)

alkali buff slurry effect (1)

antenna feeds (1)

Arrays (1)

BEC (1)

bottom electrode contact (1)

Chemica (1)

chemical mechanical planarization (1)

chemical mechanical polishing (1)

Type

Journal Paper (2)

Conference Paper (1)

Language (ISO)

English (3)

Content Type

Metadata Only (3)

Publication Title

Electron Devices, IEEE Transactions on (1)

olid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on (1)

Semiconductor Manufacturing, IEEE Transactions on (1)

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