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Study and Improvement on Tungsten Plug Corrosion in CMP Process for PCRAM

Type: Journal Paper

Author : Ying Li; Zhitang Song; Bo Liu; Guanping Wu; Songlin Feng

Publisher: IEEE

Year: 2014

Crosstalk reduction in holographic wavelength selective switches based on phase-only LCOS devices

Type: Conference Paper

Author : Haining Yang , Robertson, B. , Daping Chu

Publisher: IEEE

Year: 2014

On shaping gain in the nonlinear fiber-optic channel

Type: Conference Paper

Author : Dar, R. , Feder, M. , Mecozzi, A. , Shtaif, M.

Publisher: IEEE

Year: 2014

Author

Bo Liu (1)

Dar, R. , Feder, M. , Mecozzi, A. , Shtaif, M. (1)

Guanping Wu (1)

Haining Yang , Robertson, B. , Daping Chu (1)

Songlin Feng (1)

Ying Li (1)

Zhitang Song (1)

Publisher

IEEE (3)

Year

2014 (3)

Keywords

chemical mechanical polishing (3)

planarisation (2)

Tungsten (2)

tungsten (2)

W (2)

acidic buff slurry effect (1)

alkali buff slurry effect (1)

Arrays (1)

auxiliary polycrystalline Si layer (1)

barrier selective approach (1)

Type

Conference Paper (2)

Journal Paper (1)

Language (ISO)

English (3)

Content Type

Metadata Only (3)

Publication Title

nformation Theory (ISIT), 2014 IEEE International Symposium on (1)

ptical Fiber Communications Conference and Exhibition (OFC), 2014 (1)

Semiconductor Manufacturing, IEEE Transactions on (1)

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