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Capacitive Pressure Sensors Based on MEMS, Operating in Harsh Environments
Year: 2008
Abstract:
Poly-crystalline silicon carbide (poly SiC) Micro-electromechanical systems (MEMS) capacitive pressure sensors operating at harsh environments (e.g. high temperature) are proposed because of SiC owing excellent electrical stability, mechanical...
Special Series on Harsh Chips [Guest editors' introduction]
Publisher: IEEE
Year: 2014
Design and Development of CMOS Image Sensor for Motion Detection & Localization
Publisher: IEEE
Year: 2014
Development of a Temperature Distributed Monitoring System Based On Raman Scattering in Harsh Environment
Publisher: IEEE
Year: 2014
Experimental Characterization of Diversity Navigation
Publisher: IEEE
Year: 2014