Search

Now showing items 1-10 of 11

Enhanced Plasma Uniformity in RF Plasma With Side Multihole

Type: Journal Paper

Author : Hyo-Chang Lee; Chin-Wook Chung

Publisher: IEEE

Year: 2014

Simulation of Low-Pressure Capacitively Coupled Plasmas Combining a Parallelized Particle-in-Cell Simulation and Direct Simulation of Monte Carlo

Type: Journal Paper

Author : Jin Seok Kim; Min Young Hur; In Cheol Song; Ho-Jun Lee; Hae June Lee

Publisher: IEEE

Year: 2014

Speed position control system for DC motor

Type: Conference Paper

Author : Ciucur, V.-V.

Publisher: IEEE

Year: 2014

An improved SVPWM based shunt active power filter for compensation of power system harmonics

Type: Conference Paper

Author : Varaprasad, O.V.S.R. , Sarma, D.V.S.S.S.

Publisher: IEEE

Year: 2014

Analytical Determination of Collisional Sheath Properties for Triple Frequency Capacitively Coupled Plasma

Type: Journal Paper

Author : Rahman, M.T.; Dewan, M.N.A.

Publisher: IEEE

Year: 2014

Instabilities in Capacitively Coupled Plasmas Driven by Asymmetric Trapezoidal Voltage Pulses

Type: Journal Paper

Author : Diomede, Paola; Economou, Demetre J.; Donnelly, Vincent M.

Publisher: IEEE

Year: 2014

Modeling of Low Temperature Plasma for Surface and Airborne Decontamination

Type: Journal Paper

Author : Mihailova, Diana; van Dijk, Jan; Hagelaar, Gerardus; Belenguer, Philippe; Guillot, Phillipe

Publisher: IEEE

Year: 2014

Effect of Multiple Frequency H<sub>2</sub>/Ar Plasma Treatment on the Optical, Electrical, and Structural Properties of AZO Films

Type: Journal Paper

Author : Mingzhi Wu; Tianyuan Huang; Chenggang Jin; Lanjian Zhuge; Qin Han; Xuemei Wu

Publisher: IEEE

Year: 2014

The Multipole Resonance Probe: Progression and Evaluation of a Process Compatible Plasma Sensor

Type: Journal Paper

Author : Schulz, Claudia; Styrnoll, Tim; Storch, R.; Awakowicz, Peter; Musch, Thomas; Rolfes, Ilona

Publisher: IEEE

Year: 2014

Fabrication of SnS Using PECVD Method With Combined Solid Sources

Type: Journal Paper

Author : Junfeng Chen; Pei Liu; Ming Chen; Shengming Wang; Guodong Wang; Minghai Liu

Publisher: IEEE

Year: 2014

Search

Enhanced Plasma Uniformity in RF Plasma With Side Multihole

Simulation of Low-Pressure Capacitively Coupled Plasmas Combining a Parallelized Particle-in-Cell Simulation and Direct Simulation of Monte Carlo

Speed position control system for DC motor

An improved SVPWM based shunt active power filter for compensation of power system harmonics

Analytical Determination of Collisional Sheath Properties for Triple Frequency Capacitively Coupled Plasma

Instabilities in Capacitively Coupled Plasmas Driven by Asymmetric Trapezoidal Voltage Pulses

Modeling of Low Temperature Plasma for Surface and Airborne Decontamination

Effect of Multiple Frequency H<sub>2</sub>/Ar Plasma Treatment on the Optical, Electrical, and Structural Properties of AZO Films

The Multipole Resonance Probe: Progression and Evaluation of a Process Compatible Plasma Sensor

Fabrication of SnS Using PECVD Method With Combined Solid Sources

Author

Publisher

Year

Keywords

Type

Language (ISO)

Content Type

Publication Title

Search

Filters

Enhanced Plasma Uniformity in RF Plasma With Side Multihole

Simulation of Low-Pressure Capacitively Coupled Plasmas Combining a Parallelized Particle-in-Cell Simulation and Direct Simulation of Monte Carlo

Speed position control system for DC motor

An improved SVPWM based shunt active power filter for compensation of power system harmonics

Analytical Determination of Collisional Sheath Properties for Triple Frequency Capacitively Coupled Plasma

Instabilities in Capacitively Coupled Plasmas Driven by Asymmetric Trapezoidal Voltage Pulses

Modeling of Low Temperature Plasma for Surface and Airborne Decontamination

Effect of Multiple Frequency H<sub>2</sub>/Ar Plasma Treatment on the Optical, Electrical, and Structural Properties of AZO Films

The Multipole Resonance Probe: Progression and Evaluation of a Process Compatible Plasma Sensor

Fabrication of SnS Using PECVD Method With Combined Solid Sources