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Assessment of minority-alloy component segregation (e.g. Mn, Al) in back end of line copper trench structures using Kelvin probe technique

date accessioned2020-03-12T20:01:50Z
date available2020-03-12T20:01:50Z
date issued2014
identifier other6847017.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/999175?show=full
formatgeneral
languageEnglish
publisherIEEE
titleAssessment of minority-alloy component segregation (e.g. Mn, Al) in back end of line copper trench structures using Kelvin probe technique
typeConference Paper
contenttypeMetadata Only
identifier padid8119478
subject keywordsAugmented reality
subject keywordsIEC standards
subject keywordsISO standards
subject keywordsSensors
subject keywordsTransform coding
identifier doi10.1109/ICITCS.2014.7021784
journal titledvanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
filesize330540
citations0
contributor rawauthorNag, J. , Kohli, K. , Simon, A. , Krishnan, S. , Parks, C. , Ray, S. , Tijiwa-Birk, F.


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