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FDC R2R variation monitoring for sensor level diagnosis in tool condition hierarchy

contributor authorBlue, J. , Roussy, A. , Pinaton, J.
date accessioned2020-03-12T20:01:47Z
date available2020-03-12T20:01:47Z
date issued2014
identifier other6846984.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/999143?locale-attribute=fa&show=full
formatgeneral
languageEnglish
publisherIEEE
titleFDC R2R variation monitoring for sensor level diagnosis in tool condition hierarchy
typeConference Paper
contenttypeMetadata Only
identifier padid8119439
subject keywordsAccuracy
subject keywordsBiological neural networks
subject keywordsClassification algorithms
subject keywordsFeature extraction
subject keywordsNoise
subject keywordsPrincipal component analysis
subject keywordsUltra wideband radar
identifier doi10.1109/ICITCS.2014.7021751
journal titledvanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
filesize695966
citations0


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