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date accessioned2020-03-12T20:01:45Z
date available2020-03-12T20:01:45Z
date issued2014
identifier other6846959.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/999118?show=full
formatgeneral
languageEnglish
publisherIEEE
titleIncorporation of direct current superposition as a means for high quality contact and slotted contact structures utilizing litho-freeze-litho-etch
typeConference Paper
contenttypeMetadata Only
identifier padid8119413
subject keywordsAuthentication
subject keywordsIdentity management systems
subject keywordsInternet of Things
subject keywordsMedical services
subject keywordsMobile handsets
identifier doi10.1109/ICITCS.2014.7021724
journal titledvanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI
filesize732424
citations0
contributor rawauthorSmith, J. , de Villiers, A. , Mohanty, N. , Miyata, Y. , Fulford, D.


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