| date accessioned | 2020-03-12T20:01:45Z | |
| date available | 2020-03-12T20:01:45Z | |
| date issued | 2014 | |
| identifier other | 6846959.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/999118?show=full | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Incorporation of direct current superposition as a means for high quality contact and slotted contact structures utilizing litho-freeze-litho-etch | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8119413 | |
| subject keywords | Authentication | |
| subject keywords | Identity management systems | |
| subject keywords | Internet of Things | |
| subject keywords | Medical services | |
| subject keywords | Mobile handsets | |
| identifier doi | 10.1109/ICITCS.2014.7021724 | |
| journal title | dvanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI | |
| filesize | 732424 | |
| citations | 0 | |
| contributor rawauthor | Smith, J. , de Villiers, A. , Mohanty, N. , Miyata, Y. , Fulford, D. | |
