date accessioned | 2020-03-12T20:01:45Z | |
date available | 2020-03-12T20:01:45Z | |
date issued | 2014 | |
identifier other | 6846959.pdf | |
identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/999118?locale-attribute=fa&show=full | |
format | general | |
language | English | |
publisher | IEEE | |
title | Incorporation of direct current superposition as a means for high quality contact and slotted contact structures utilizing litho-freeze-litho-etch | |
type | Conference Paper | |
contenttype | Metadata Only | |
identifier padid | 8119413 | |
subject keywords | Authentication | |
subject keywords | Identity management systems | |
subject keywords | Internet of Things | |
subject keywords | Medical services | |
subject keywords | Mobile handsets | |
identifier doi | 10.1109/ICITCS.2014.7021724 | |
journal title | dvanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI | |
filesize | 732424 | |
citations | 0 | |
contributor rawauthor | Smith, J. , de Villiers, A. , Mohanty, N. , Miyata, Y. , Fulford, D. | |