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contributor authorMeng Wang , Zhenhua Duan , Cong Tian
date accessioned2020-03-12T20:01:36Z
date available2020-03-12T20:01:36Z
date issued2014
identifier other6846870.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/999032?show=full
formatgeneral
languageEnglish
publisherIEEE
titleSimulation and verification of the virtual memory management system with MSVL
typeConference Paper
contenttypeMetadata Only
identifier padid8119315
subject keywordscantilevers
subject keywordselasticity
subject keywordsfinite element analysis
subject keywordsinternal stresses
subject keywordsmanufacturing processes
subject keywordsmicromechanical devices
subject keywordsthin film devices
subject keywordsANSYS software
subject keywordsMEMS thin film feature
subject keywordsdeflection angle
subject keywordselasticity formulas
subject keywordsfinite element analysis
subject keywordsgeometric principles
subject keywordshigh accuracy process
subject keywordslow deviation process
subject keywordsmanufacturing process
subject keywordsresidual stress test structure
subject keywordssimplified process
subject keywordssingle-cantilever-beam microrotating structure
subject keywordsstructural parameter
subject keywordsAbstracts
subject keywordsFilms
subject keywordsGallium arsenide
subject keywordsManufactu
identifier doi10.1109/ICSICT.2014.7021635
journal titleomputer Supported Cooperative Work in Design (CSCWD), Proceedings of the 2014 IEEE 18th Internationa
filesize392440
citations0


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