| contributor author | Marin, G. , Dongarra, J. , Terpstra, D. | |
| date accessioned | 2020-03-12T19:59:07Z | |
| date available | 2020-03-12T19:59:07Z | |
| date issued | 2014 | |
| identifier other | 6844480.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/997566?show=full | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | MIAMI: A framework for application performance diagnosis | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8117542 | |
| subject keywords | Young' | |
| subject keywords | s modulus | |
| subject keywords | aluminium | |
| subject keywords | electrical resistivity | |
| subject keywords | elemental semiconductors | |
| subject keywords | microactuators | |
| subject keywords | micromachining | |
| subject keywords | silicon | |
| subject keywords | silicon compounds | |
| subject keywords | thermal conductivity | |
| subject keywords | Al | |
| subject keywords | PolyMEMS-INAOE fabrication process | |
| subject keywords | Si | |
| subject keywords | SiN | |
| subject keywords | SiO< | |
| subject keywords | sub> | |
| subject keywords | 2< | |
| subject keywords | /sub> | |
| subject keywords | Young' | |
| subject keywords | s modulus | |
| subject keywords | bulk-surface micromachined polyMEMS test chip | |
| subject keywords | compression stresses | |
| subject keywords | doping level | |
| subject keywords | electrical property characterization | |
| subject keywords | electrical resistivity | |
| subject keywords | mechanical actuators | |
| subject keywords | mechanical properties | |
| subject keywords | monocrystalline silicon | |
| subject keywords | phosphosilicate glas | |
| identifier doi | 10.1109/ICCDCS.2014.7016162 | |
| journal title | erformance Analysis of Systems and Software (ISPASS), 2014 IEEE International Symposium on | |
| filesize | 1035003 | |
| citations | 0 | |