Operation of Lorentz-Force MEMS Magnetometers With a Frequency Offset Between Driving Current and Mechanical Resonance
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سال
: 2014شناسه الکترونیک: 10.1109/TMAG.2013.2281404
کلیدواژه(گان): constant current sources,force measurement,force sensors,low-power electronics,magnetic field measurement,magnetic flux,magnetic sensors,magnetometers,microfabrication,microsensors,Lorentz-force MEMS magnetometer,Lorentz-force-based microelectromechanical magnetometer,current consumption,damping coefficient,driving-current frequency offset,figure of merit,low-power 3-axis magnetic field sensor,maximum sensing bandwidth,mechanical resonance frequency,microfabrication,minimum d
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Operation of Lorentz-Force MEMS Magnetometers With a Frequency Offset Between Driving Current and Mechanical Resonance
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contributor author | Langfelder, Giacomo | |
contributor author | Tocchio, Alessandro | |
date accessioned | 2020-03-12T18:27:52Z | |
date available | 2020-03-12T18:27:52Z | |
date issued | 2014 | |
identifier issn | 0018-9464 | |
identifier other | 6595611.pdf | |
identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/959382 | |
format | general | |
language | English | |
publisher | IEEE | |
title | Operation of Lorentz-Force MEMS Magnetometers With a Frequency Offset Between Driving Current and Mechanical Resonance | |
type | Journal Paper | |
contenttype | Metadata Only | |
identifier padid | 7991943 | |
subject keywords | constant current sources | |
subject keywords | force measurement | |
subject keywords | force sensors | |
subject keywords | low-power electronics | |
subject keywords | magnetic field measurement | |
subject keywords | magnetic flux | |
subject keywords | magnetic sensors | |
subject keywords | magnetometers | |
subject keywords | microfabrication | |
subject keywords | microsensors | |
subject keywords | Lorentz-force MEMS magnetometer | |
subject keywords | Lorentz-force-based microelectromechanical magnetometer | |
subject keywords | current consumption | |
subject keywords | damping coefficient | |
subject keywords | driving-current frequency offset | |
subject keywords | figure of merit | |
subject keywords | low-power 3-axis magnetic field sensor | |
subject keywords | maximum sensing bandwidth | |
subject keywords | mechanical resonance frequency | |
subject keywords | microfabrication | |
subject keywords | minimum d | |
identifier doi | 10.1109/TMAG.2013.2281404 | |
journal title | Magnetics, IEEE Transactions on | |
journal volume | 50 | |
journal issue | 1 | |
filesize | 1643120 | |
citations | 0 |