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Performance of Electro-Thermally Driven <formula formulatype="inline"> <img src="/images/tex/20489.gif" alt="{\\rm VO}_{2}"> </formula>-Based MEMS Actuators

contributor authorCabrera, Rafmag
contributor authorMerced, Emmanuelle
contributor authorSepulveda, Nelson
date accessioned2020-03-12T18:25:20Z
date available2020-03-12T18:25:20Z
date issued2014
identifier issn1057-7157
identifier other6560383.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/957947?show=full
formatgeneral
languageEnglish
publisherIEEE
titlePerformance of Electro-Thermally Driven <formula formulatype="inline"> <img src="/images/tex/20489.gif" alt="{\\rm VO}_{2}"> </formula>-Based MEMS Actuators
typeJournal Paper
contenttypeMetadata Only
identifier padid7990337
subject keywordsfinite element analysis
subject keywordsmicroactuators
subject keywordsphase transformations
subject keywordsvanadium compounds
subject keywordsMEMS actuator device
subject keywordsVO<
subject keywordssub>
subject keywords2<
subject keywords/sub>
subject keywordsconductive heat loss
subject keywordsdrastic mechanical displacements
subject keywordselectrothermally driven MEMS actuators
subject keywordsfinite element model
subject keywordsfrequency 29 Hz
subject keywordsresistive heaters
subject keywordssize 200 mum
subject keywordssize 300 mum
subject keywordsstructural phase transition
subject keywordsthin film phase transition
subject keywordstime dependent current pulses
subject keywordsActuators
subject keywordsAtmospheric modeling
subject keywordsCrystals
subject keywordsFinite element analysis
subject keywordsHeating
subject keywordsMicromechanical dev
identifier doi10.1109/JMEMS.2013.2271774
journal titleMicroelectromechanical Systems, Journal of
journal volume23
journal issue1
filesize3210066
citations0


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