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An integrated MEMS three-dimensional tactile sensor with large force range

contributor authorTao Mei
contributor authorWen J. Li
contributor authorYu Ge
contributor authorYong Chen
contributor authorLin Ni
contributor authorMing Ho Chan
date accessioned2020-03-12T14:43:52Z
date available2020-03-12T14:43:52Z
date issued2000
identifier otherFGzoG5OqmDBr6KTv4QkBRZRnxUZ_aOmam9J5nZbgIOg2P4Ah8W.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/902107?locale-attribute=en&show=full
formatgeneral
languageEnglish
titleAn integrated MEMS three-dimensional tactile sensor with large force range
typeJournal Paper
contenttypeFulltext
contenttypeFulltext
identifier padid7313386
identifier doi10.1016/s0924-4247(99)00261-7
coverageAcademic
pages155-162
journal volume80
journal issue2
filesize1067142
citations1


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