[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever
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: 2012DOI: 10.1109/MEMSYS.2012.6170178
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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever
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| contributor author | Kobayashi, T. | |
| contributor author | Oyama, S. | |
| contributor author | Okada, H. | |
| contributor author | Makimoto, N. | |
| contributor author | Tanaka, K. | |
| contributor author | Itoh, T. | |
| contributor author | Maeda, R. | |
| date accessioned | 2020-03-12T09:57:54Z | |
| date available | 2020-03-12T09:57:54Z | |
| date issued | 2012 | |
| identifier other | rSrwFO_fal4kuU0TxBem3BTiEfkYgcnblD_yv4Kz4yHMeTHOqM.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/827700 | |
| format | general | |
| language | English | |
| title | [IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever | |
| type | Journal Paper | |
| contenttype | Fulltext | |
| contenttype | Fulltext | |
| identifier padid | 6552986 | |
| identifier doi | 10.1109/MEMSYS.2012.6170178 | |
| journal title | Osmania Journal of Social Sciences | |
| coverage | Academic | |
| pages | 527-530 | |
| filesize | 1867785 | |
| citations | 4 |