High-κ Dielectric Materials for Microelectronics
| contributor author | Wallace, Robert M. | |
| contributor author | Wilk, Glen D. | |
| date accessioned | 2020-03-11T11:20:09Z | |
| date available | 2020-03-11T11:20:09Z | |
| date issued | 2003 | |
| identifier other | uux8JJQeTgJJTb0nfPncJIwo3G4xcrgD1jbIu3fpXW7f2mylnF.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/511318?show=full | |
| format | general | |
| language | English | |
| publisher | Taylor and Francis Group | |
| title | High-κ Dielectric Materials for Microelectronics | |
| type | Journal Paper | |
| contenttype | Fulltext | |
| contenttype | Fulltext | |
| identifier padid | 4189064 | |
| identifier doi | 10.1080/714037708 | |
| journal title | Critical Reviews in Solid State and Materials Sciences | |
| coverage | Academic | |
| pages | 231-285 | |
| journal volume | 28 | |
| journal issue | 4 | |
| filesize | 1229159 | |
| citations | 1 |