Transient Characteristics of Microelectromechanical Systems Considering Squeeze Film Damping and Electrostatic Actuation

Abstract

In this study, the GDQ method is used to evaluate transient characteristics of microelectormechanical systems. The presented model is nonlinear due to the von Kármán-type geometric nonlinearity in the Euler-Bernoulli beam hypothesis. Also, the nonlinear Reynolds equation is utilized to model squeeze film damping phenomenon. Numerical results in the presence of squeeze film damping, dynamic distributed applied load, electrostatic actuation, and pull-in instability are obtained and examined with a parametric study. In addition, the accuracy of present method is verified by comprising the results with experimental data and excellent agreement between them are observed. It is found that by decreasing the resistance of fluid pressure, micro-beam will be actuated more conveniently. In particular, it is indicated that the geometry effect of the micro-beam on the pull-in voltage is significant.