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Material and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOE

contributor authorآرمان محسن زادهen
contributor authorمسعود طهانیen
contributor authorسروش دقیقه رضائیen
contributor authorArman Mohsenzadehfa
contributor authorMasoud Tahanifa
contributor authorSoroosh Daqiqeh Rezaeifa
date accessioned2020-06-06T14:13:37Z
date available2020-06-06T14:13:37Z
date copyright2/18/2014
date issued2014
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/3387731?show=full
description abstractIn this work, a fully clamped micro-beam is modeled using commercial FEM software (COMSOL

Multiphysics). The model is designed to investigate the pull-in instability of the micro-beam under the effect of

electrostatic field induced by the applied voltage. To this end, the device is modeled in 2-D space which has

rapid calculation procedure and decreases time and cost of calculation. The micro-beam is also modeled in 3-D space which is more pursuant to the reality and its results are quite compatible with previous works in the

literature. Finally effects of different characteristics of micro-beam including material and geometrical

properties are investigated on pull-in voltage using Taguchi DOE.		en
languageEnglish
titleMaterial and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOEen
typeConference Paper
contenttypeExternal Fulltext
subject keywordsMicro-beamen
subject keywordsPull-in voltageen
subject keywordsCOMSOL Multiphysicsen
subject keywordsFEMen
subject keywordsTaguchi DOEen
identifier linkhttps://profdoc.um.ac.ir/paper-abstract-1040234.html
conference titleThe First International Conference on MEMS and Microfabricationen
conference locationTehranfa
identifier articleid1040234


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