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Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983

contributor authorL F Thompson
contributor authorC G Willson
contributor authorM J Bowden
contributor authorAmerican Chemical Society. Meeting (eds.)
date accessioned2020-04-21T19:33:32Z
date available2020-04-21T19:33:32Z
date copyright1983
identifier isbn0841207755,9780841207752
identifier other/pad-books/801000-900000/872000/568d45badbfd8ff1949f4afaa9187815.djvu
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/3031909?show=full
format mimetypeapplication/djvu
languageEnglish
publisherAmerican Chemical Society
titleIntroduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
typeEbook
contenttypeFulltext
identifier padid934377
coveragegeneral
pages364
filesize5036192
identifier linkhttps://pad.um.ac.ir/file/view/934377
seriesACS symposium series, 219
contributor rawauthorAmerican Chemical Society. Division of Organic Coatings and Plastics Chemistry.


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