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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing

Author:
Wei Gao
Publisher:
Springer
ISBN: 1849962537,9781849962537
Language:
English
URI: https://libsearch.um.ac.ir:443/fum/handle/fum/2874797
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    Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing

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contributor authorWei Gao
date accessioned2020-04-20T14:10:29Z
date available2020-04-20T14:10:29Z
date copyright2010
identifier isbn1849962537,9781849962537
identifier other/pad-books/601000-700000/672000/d3a887abbaa3b3969c56e3621cc26656.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/2874797
format mimetypeapplication/pdf
languageEnglish
publisherSpringer
titlePrecision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing
typeEbook
contenttypeFulltext
identifier padid777158
coveragegeneral
pages369
filesize22999199
identifier linkhttps://pad.um.ac.ir/file/view/777158
description edition1st Edition.
identifier ddc620.50287
identifier lccTA418.9.N35 G36 2010
seriesSpringer Series in Advanced Manufacturing
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