
Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing
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ISBN: 1849962537,9781849962537
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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing
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| contributor author | Wei Gao | |
| date accessioned | 2020-04-20T14:10:29Z | |
| date available | 2020-04-20T14:10:29Z | |
| date copyright | 2010 | |
| identifier isbn | 1849962537,9781849962537 | |
| identifier other | /pad-books/601000-700000/672000/d3a887abbaa3b3969c56e3621cc26656.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/2874797 | |
| format mimetype | application/pdf | |
| language | English | |
| publisher | Springer | |
| title | Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing | |
| type | Ebook | |
| contenttype | Fulltext | |
| identifier padid | 777158 | |
| coverage | general | |
| pages | 369 | |
| filesize | 22999199 | |
| identifier link | https://pad.um.ac.ir/file/view/777158 | |
| description edition | 1st Edition. | |
| identifier ddc | 620.50287 | |
| identifier lcc | TA418.9.N35 G36 2010 | |
| series | Springer Series in Advanced Manufacturing |


