سنسورهای فشار خازنی MEMS : مروری بر توسعه اخیر و آینده ی آن
| contributor author | علیرضا, بهادری مهر | |
| contributor author | عباس, بدری آزاد | |
| date accessioned | 2020-04-12T02:05:12Z | |
| date available | 2020-04-12T02:05:12Z | |
| date issued | 2016 | |
| identifier other | DPt9IhkwnFkWGn9cjiycjA0ahQSHiLgTuIGoWYZvCwlhjOJ3mc.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/2488730?locale-attribute=en&show=full | |
| format | general | |
| language | Farsi | |
| title | سنسورهای فشار خازنی MEMS : مروری بر توسعه اخیر و آینده ی آن | |
| type | Conference Paper | |
| contenttype | Fulltext | |
| identifier padid | 15182872 | |
| journal title | 1st national conference on interdisciplinary research in computer engineering, electrical, mechanica | |
| coverage | Academic | |
| filesize | 831407 | |
| citations | 3 | |
| identifier link | https://www.civilica.com/Paper-IRCEM01-IRCEM01_233.html |