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contributor authorganji, b.a; mousavi, a
date accessioned2020-04-11T15:16:45Z
date available2020-04-11T15:16:45Z
identifier otherDer_H6QjRRG8M4ALMctwDR2K39HPDhzHmSjJX7MUerW2Xu8JQX.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/2346714?show=full
formatgeneral
languageFarsi
titleAccurate Determination of Pull-in Voltage for MEMS Capacitive Devices with Clamped Square Diaphragm
typeConference Paper
contenttypeFulltext
identifier padid4403903
subject keywordsMEMS,Capacitive Device,Pull-in Voltage,Diaphragm Deformation
identifier doinull
coverageAcademic
filesize876113
citations1
identifier linkhttp://www.civilica.com/Paper-JR_IJE-JR_IJE-25-3_012.html


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