Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation
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: 2013DOI: 10.1109/TMECH.2012.2203315
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Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation
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contributor author | Gu, Guo-Ying | |
contributor author | Zhu, Li-Min | |
contributor author | Su, Chun-Yi | |
contributor author | Ding, Han | |
date accessioned | 2020-03-13T01:19:09Z | |
date available | 2020-03-13T01:19:09Z | |
date issued | 2013 | |
identifier other | eQZO4nA0OCCM2ERConZ8RNS8QUZqz8M1WqROL9mpoinsJA6BCE.pdf | |
identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1162056?locale-attribute=en | |
format | general | |
language | English | |
title | Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation | |
type | Journal Paper | |
contenttype | Fulltext | |
contenttype | Fulltext | |
identifier padid | 8419283 | |
identifier doi | 10.1109/TMECH.2012.2203315 | |
coverage | Academic | |
pages | 1459-1471 | |
journal volume | 18 | |
journal issue | 5 | |
filesize | 1614308 | |
citations | 1 |