Temperature Error Compensation in Two-Component Microelectromechanical Gyroscope
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Year
: 2014DOI: 10.1109/TCPMT.2014.2327958
Keyword(s): Coriolis force,angular velocity measurement,electrostatic actuators,elemental semiconductors,error compensation,finite element analysis,gyroscopes,microsensors,silicon,vibrations,Coriolis force,Si,angular velocity component determination,electrostatic actuator,finite element analysis,linear harmonic motion,microelectromechanical gyroscope,micromechanical angular velocity sensor,primary vibrations,sensing element,silicon sensor,temperature error compensation,vibration eigenf
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Temperature Error Compensation in Two-Component Microelectromechanical Gyroscope
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| contributor author | Nesterenko, Tamara G. | |
| contributor author | Koleda, Aleksei N. | |
| contributor author | Barbin, Evgenii S. | |
| contributor author | Uchaikin, Sergey V. | |
| date accessioned | 2020-03-13T00:19:31Z | |
| date available | 2020-03-13T00:19:31Z | |
| date issued | 2014 | |
| identifier issn | 2156-3950 | |
| identifier other | 6881628.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1142552 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Temperature Error Compensation in Two-Component Microelectromechanical Gyroscope | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8325095 | |
| subject keywords | Coriolis force | |
| subject keywords | angular velocity measurement | |
| subject keywords | electrostatic actuators | |
| subject keywords | elemental semiconductors | |
| subject keywords | error compensation | |
| subject keywords | finite element analysis | |
| subject keywords | gyroscopes | |
| subject keywords | microsensors | |
| subject keywords | silicon | |
| subject keywords | vibrations | |
| subject keywords | Coriolis force | |
| subject keywords | Si | |
| subject keywords | angular velocity component determination | |
| subject keywords | electrostatic actuator | |
| subject keywords | finite element analysis | |
| subject keywords | linear harmonic motion | |
| subject keywords | microelectromechanical gyroscope | |
| subject keywords | micromechanical angular velocity sensor | |
| subject keywords | primary vibrations | |
| subject keywords | sensing element | |
| subject keywords | silicon sensor | |
| subject keywords | temperature error compensation | |
| subject keywords | vibration eigenf | |
| identifier doi | 10.1109/TCPMT.2014.2327958 | |
| journal title | Components, Packaging and Manufacturing Technology, IEEE Transactions on | |
| journal volume | 4 | |
| journal issue | 10 | |
| filesize | 1976431 | |
| citations | 0 |