Show simple item record

Long-Term Effects of Relative Humidity on the Performance of ZnO-Based MEMS Acoustic Sensors

contributor authorPrasad, M.
contributor authorSahula, Vineet
contributor authorKhanna, Vinod Kumar
date accessioned2020-03-12T23:58:26Z
date available2020-03-12T23:58:26Z
date issued2014
identifier issn1530-4388
identifier other6798753.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1129957?show=full
formatgeneral
languageEnglish
publisherIEEE
titleLong-Term Effects of Relative Humidity on the Performance of ZnO-Based MEMS Acoustic Sensors
typeJournal Paper
contenttypeMetadata Only
identifier padid8310381
subject keywordsetching
subject keywordsmicromachining
subject keywordsmicrosensors
subject keywordspassivation
subject keywordsplasma CVD
subject keywordsAl
subject keywordsMEMS acoustic sensors
subject keywordsPECVD layer
subject keywordsPECVD silicon dioxide
subject keywordsSi
subject keywordsZnO
subject keywordsacoustic sensor chip
subject keywordsaluminum electrodes
subject keywordsbulk micromachining technique
subject keywordsdissipation factor
subject keywordsetching
subject keywordsfabrication process
subject keywordsfrequency response
subject keywordshumid environment conditions
subject keywordspassivating layer
subject keywordsrelative humidity
subject keywordssensitivity response
subject keywordssilicon diaphragm
subject keywordssize 0.3 mum
subject keywordssize 25 mum
subject keywordsweak acid
subject keywordsAcoustic measurements
subject keywordsAcoustic sensors
subject keywordsCapacitance
subject keywordsEtching
subject keywordsHumidity
identifier doi10.1109/TDMR.2014.2317415
journal titleDevice and Materials Reliability, IEEE Transactions on
journal volume14
journal issue2
filesize544761
citations0


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

Show simple item record