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contributor authorArayawat, Suvishchan
contributor authorThepmanee, Teerawat
contributor authorJulsereewong, Prasit
contributor authorJulsereewong, Amphawan
date accessioned2020-03-12T22:53:08Z
date available2020-03-12T22:53:08Z
date issued2014
identifier other7028132.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1097928?show=full
formatgeneral
languageEnglish
publisherIEEE
titleProcess alarming in PID loop using foundation fieldbus with control in the field: A case study of DeltaV host system
typeConference Paper
contenttypeMetadata Only
identifier padid8238913
subject keywordscapacitive sensors
subject keywordsn copper
subject keywordsn electroplating
subject keywordsn micromachining
subject keywordsn nickel
subject keywordsn organic compounds
subject keywordsn photoresists
subject keywordsn titanium
subject keywordsn ultrasonic transducer arrays
subject keywordsn CMUT array
subject keywordsn Doppler velocity sensor
subject keywordsn Ni
subject keywordsn TI-Cu sacrificial layer
subject keywordsn Ti-Cu
subject keywordsn acetone
subject keywordsn capacitive micromachined ultrasonic transducer array
subject keywordsn convex membrane
subject keywordsn convex shape
subject keywordsn frequency 180 kHz
subject keywordsn glass process
subject keywordsn impedance analyzer
subject keywordsn nickel electroplating
subject keywordsn nickel membranes
subject keywordsn pre-f
identifier doi10.1109/NEMS.2014.6908882
journal titleystem Integration (SII), 2014 IEEE/SICE International Symposium on
filesize1059430
citations0


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