contributor author | Jouh Yeong Chew | |
contributor author | Shunsuke, S. | |
contributor author | Kurabayashi, D. | |
date accessioned | 2020-03-12T22:38:24Z | |
date available | 2020-03-12T22:38:24Z | |
date issued | 2014 | |
identifier other | 7017684.pdf | |
identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1089612?locale-attribute=en&show=full | |
format | general | |
language | English | |
publisher | IEEE | |
title | Time-variant chemical plume tracing inspired by the silk moth | |
type | Conference Paper | |
contenttype | Metadata Only | |
identifier padid | 8227864 | |
subject keywords | focused ion beam technology | |
subject keywords | n gallium | |
subject keywords | n integrated circuit manufacture | |
subject keywords | n integrated circuit reliability | |
subject keywords | n ion beams | |
subject keywords | n sputter etching | |
subject keywords | n xenon | |
subject keywords | n Ga | |
subject keywords | n advanced process technologies | |
subject keywords | n beam sensitive materials | |
subject keywords | n focused ion beam technology | |
subject keywords | n ion beams | |
subject keywords | n localized FIB delayering | |
subject keywords | n Chemistry | |
subject keywords | n Copper | |
subject keywords | n Dielectrics | |
subject keywords | n Failure analysis | |
subject keywords | n Materials | |
subject keywords | n Milling | |
identifier doi | 10.1109/IPFA.2014.6898144 | |
journal title | afety, Security, and Rescue Robotics (SSRR), 2014 IEEE International Symposium on | |
filesize | 502740 | |
citations | 0 | |