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Conference program

date accessioned2020-03-12T22:18:20Z
date available2020-03-12T22:18:20Z
date issued2014
identifier other7002290.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1078390?show=full
formatgeneral
languageEnglish
publisherIEEE
titleConference program
typeConference Paper
contenttypeMetadata Only
identifier padid8214683
subject keywordsIII-V semiconductors
subject keywordsn cathodoluminescence
subject keywordsn diffusion
subject keywordsn indium compounds
subject keywordsn photoluminescence
subject keywordsn plasma materials processing
subject keywordsn secondary ion mass spectra
subject keywordsn semiconductor quantum wells
subject keywordsn spectral line shift
subject keywordsn sputter etching
subject keywordsn Cl diffusion
subject keywordsn InP-InAsP
subject keywordsn InP-InAsP quantum well structures
subject keywordsn InP-based photonic structures
subject keywordsn SIMS
subject keywordsn blue shift
subject keywordsn cathodoIuminescence
subject keywordsn chlorine-based gas chemistries
subject keywordsn composition profiles
subject keywordsn deep reactive ion etching
identifier doi10.1109/ICIPRM.2014.6880554
journal titlehotonics (ICP), 2014 IEEE 5th International Conference on
filesize5636245
citations0


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