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contributor authorAnand, B.
contributor authorAntony Venus, A.J.
contributor authorSrinivasan, Mukundhan
contributor authorVictor, Arun Noel
contributor authorMadhuri K.
contributor authorSree Rakshaa, S.P.
contributor authorVijayaraghavan, Vineeth
contributor authorKulkarni, Kartik
date accessioned2020-03-12T22:00:13Z
date available2020-03-12T22:00:13Z
date issued2014
identifier other6970270.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1068039?show=full
formatgeneral
languageEnglish
publisherIEEE
titleLocal Content Development Framework and Methodology for knowledge and skill development: IEEE Madras Section SIGHT case study
typeConference Paper
contenttypeMetadata Only
identifier padid8202993
subject keywordsdischarges (electric)
subject keywordsn integrated circuit manufacture
subject keywordsn sputter etching
subject keywordsn atomic collision
subject keywordsn fast positive ions
subject keywordsn free plasma etching
subject keywordsn gas discharge
subject keywordsn integrated circuit manufacture
subject keywordsn molecular collision
subject keywordsn nanotechnologies fast neutrals
subject keywordsn swarm physics
subject keywordsn Cathodes
subject keywordsn Discharges (electric)
subject keywordsn Doppler effect
subject keywordsn Etching
subject keywordsn Hydrogen
subject keywordsn Ions
subject keywordsn Surface discharges
identifier doi10.1109/MIEL.2014.6842079
journal titlelobal Humanitarian Technology Conference (GHTC), 2014 IEEE
filesize1127513
citations0


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