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One possibility for the synthesis of autonom Petri Nets

contributor authorLeca, Mihai
date accessioned2020-03-12T21:59:45Z
date available2020-03-12T21:59:45Z
date issued2014
identifier other6969990.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1067769?show=full
formatgeneral
languageEnglish
publisherIEEE
titleOne possibility for the synthesis of autonom Petri Nets
typeConference Paper
contenttypeMetadata Only
identifier padid8202599
subject keywordsYoung'
subject keywordss modulus
subject keywordsn dielectric thin films
subject keywordsn internal stresses
subject keywordsn micromechanical devices
subject keywordsn photoresists
subject keywordsn strain measurement
subject keywordsn MEMS devices
subject keywordsn SU-8 films
subject keywordsn SU-8 negative epoxy
subject keywordsn Young'
subject keywordss modulus
subject keywordsn automated wafer mapping
subject keywordsn dielectric films
subject keywordsn dielectric layer
subject keywordsn parylene-C
subject keywordsn photoresist
subject keywordsn post-processing thermal treatment
subject keywordsn processing temperatures
subject keywordsn residual stress
subject keywordsn rotating pointer arm test structures
subject keywordsn strain measurements
subject keywordsn struct
identifier doi10.1109/ICMTS.2014.6841475
journal titlelectrical and Power Engineering (EPE), 2014 International Conference and Exposition on
filesize695020
citations0


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