contributor author | Jingting Zeng | |
contributor author | Huodi Zhu | |
date accessioned | 2020-03-12T21:04:36Z | |
date available | 2020-03-12T21:04:36Z | |
date issued | 2014 | |
identifier other | 6923672.pdf | |
identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1036144?show=full | |
format | general | |
language | English | |
publisher | IEEE | |
title | R&D Human Capital Allocation in High-Tech Industries and Its Economic Effects | |
type | Conference Paper | |
contenttype | Metadata Only | |
identifier padid | 8162298 | |
subject keywords | chemical vapour deposition | |
subject keywords | finite element analysis | |
subject keywords | internal stresses | |
subject keywords | membranes | |
subject keywords | micromachining | |
subject keywords | microsensors | |
subject keywords | pressure sensors | |
subject keywords | silicon compounds | |
subject keywords | ANSYS software | |
subject keywords | FEA model | |
subject keywords | LPCVD | |
subject keywords | SiN | |
subject keywords | barometric pressure | |
subject keywords | debonding | |
subject keywords | delamination | |
subject keywords | finite element method | |
subject keywords | input-output characteristics | |
subject keywords | low pressure chemical vapor deposition | |
subject keywords | mechanical-electrical models | |
subject keywords | membrane | |
subject keywords | microcracking | |
subject keywords | nonstressed diaphragm | |
subject keywords | nonuniform stress profile | |
subject keywords | pressure 100 MPa | |
subject keywords | pressure 101 kPa | |
subject keywords | pressure 120 kPa | |
subject keywords | pressure-disp | |
identifier doi | 10.1109/ICEPT.2014.6922742 | |
journal title | omputational Sciences and Optimization (CSO), 2014 Seventh International Joint Conference on | |
filesize | 303570 | |
citations | 0 | |