Show simple item record

contributor authorJingting Zeng
contributor authorHuodi Zhu
date accessioned2020-03-12T21:04:36Z
date available2020-03-12T21:04:36Z
date issued2014
identifier other6923672.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1036144?show=full
formatgeneral
languageEnglish
publisherIEEE
titleR&D Human Capital Allocation in High-Tech Industries and Its Economic Effects
typeConference Paper
contenttypeMetadata Only
identifier padid8162298
subject keywordschemical vapour deposition
subject keywordsfinite element analysis
subject keywordsinternal stresses
subject keywordsmembranes
subject keywordsmicromachining
subject keywordsmicrosensors
subject keywordspressure sensors
subject keywordssilicon compounds
subject keywordsANSYS software
subject keywordsFEA model
subject keywordsLPCVD
subject keywordsSiN
subject keywordsbarometric pressure
subject keywordsdebonding
subject keywordsdelamination
subject keywordsfinite element method
subject keywordsinput-output characteristics
subject keywordslow pressure chemical vapor deposition
subject keywordsmechanical-electrical models
subject keywordsmembrane
subject keywordsmicrocracking
subject keywordsnonstressed diaphragm
subject keywordsnonuniform stress profile
subject keywordspressure 100 MPa
subject keywordspressure 101 kPa
subject keywordspressure 120 kPa
subject keywordspressure-disp
identifier doi10.1109/ICEPT.2014.6922742
journal titleomputational Sciences and Optimization (CSO), 2014 Seventh International Joint Conference on
filesize303570
citations0


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

Show simple item record