Coordinated beamforming with dynamic clustering: A stochastic geometry approach
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سال
: 2014شناسه الکترونیک: 10.1109/ICPT.2014.7017286
کلیدواژه(گان): chemical mechanical polishing,cobalt,copper,corrosion inhibitors,pH,slurries,tantalum,CMP post cleaning step,CMP slurry,Co,Cu,Ta,chelating agent,chemical mechanical polishing,cobalt,copper,corrosion inhibitor,electrochemical behavior,electrochemical screening,galvanic corrosion,metal surfaces,pH value,surface protection,tantalum,Chemicals,Cobalt,Copper,Corrosion,Corrosion inhibitors,Slurries
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Coordinated beamforming with dynamic clustering: A stochastic geometry approach
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date accessioned | 2020-03-12T20:40:58Z | |
date available | 2020-03-12T20:40:58Z | |
date issued | 2014 | |
identifier other | 6883644.pdf | |
identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1021749 | |
format | general | |
language | English | |
publisher | IEEE | |
title | Coordinated beamforming with dynamic clustering: A stochastic geometry approach | |
type | Conference Paper | |
contenttype | Metadata Only | |
identifier padid | 8146450 | |
subject keywords | chemical mechanical polishing | |
subject keywords | cobalt | |
subject keywords | copper | |
subject keywords | corrosion inhibitors | |
subject keywords | pH | |
subject keywords | slurries | |
subject keywords | tantalum | |
subject keywords | CMP post cleaning step | |
subject keywords | CMP slurry | |
subject keywords | Co | |
subject keywords | Cu | |
subject keywords | Ta | |
subject keywords | chelating agent | |
subject keywords | chemical mechanical polishing | |
subject keywords | cobalt | |
subject keywords | copper | |
subject keywords | corrosion inhibitor | |
subject keywords | electrochemical behavior | |
subject keywords | electrochemical screening | |
subject keywords | galvanic corrosion | |
subject keywords | metal surfaces | |
subject keywords | pH value | |
subject keywords | surface protection | |
subject keywords | tantalum | |
subject keywords | Chemicals | |
subject keywords | Cobalt | |
subject keywords | Copper | |
subject keywords | Corrosion | |
subject keywords | Corrosion inhibitors | |
subject keywords | Slurries | |
identifier doi | 10.1109/ICPT.2014.7017286 | |
journal title | ommunications (ICC), 2014 IEEE International Conference on | |
filesize | 171523 | |
citations | 0 | |
contributor rawauthor | Namyoon Lee , Heath, R.W. , Morales-Jimenez, D. , Lozano, A. |