| date accessioned | 2020-03-12T20:22:37Z | |
| date available | 2020-03-12T20:22:37Z | |
| date issued | 2014 | |
| identifier other | 6866573.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1012258?show=full | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Low complexity cloud-video-mixing using HEVC | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8135029 | |
| subject keywords | abrasives | |
| subject keywords | chemical mechanical polishing | |
| subject keywords | copper | |
| subject keywords | wear | |
| subject keywords | Cu | |
| subject keywords | copper barrier CMP applications | |
| subject keywords | longer pad life time | |
| subject keywords | lower defectivity | |
| subject keywords | metal-free conditioning disks | |
| subject keywords | micro replicated conditioning disks | |
| subject keywords | microreplicated pad conditioner | |
| subject keywords | pad wear | |
| subject keywords | size 22 nm | |
| subject keywords | wafer uniformity | |
| subject keywords | Diamonds | |
| subject keywords | Rough surfaces | |
| subject keywords | Standards | |
| subject keywords | Surface morphology | |
| subject keywords | Surface roughness | |
| subject keywords | Surface topography | |
| subject keywords | Surface treatment | |
| subject keywords | Cu CMP | |
| subject keywords | microreplication | |
| subject keywords | pad conditioning | |
| identifier doi | 10.1109/ICPT.2014.7017269 | |
| journal title | onsumer Communications and Networking Conference (CCNC), 2014 IEEE 11th | |
| filesize | 451166 | |
| citations | 0 | |
| contributor rawauthor | Sanchez, Y. , Globisch, R. , Schierl, T. , Wiegand, T. | |