Quartz-based vibrating MEMS fabricated using a wafer-bonding process with sealed cavities
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: 2014DOI: 10.1109/MILCOM.2014.207
Keyword(s): Green products,Laser radar,Mobile robots,Navigation,Sensors,Turning,Vehicles,autonomous navigation,path finding,variable speed
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Quartz-based vibrating MEMS fabricated using a wafer-bonding process with sealed cavities
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| date accessioned | 2020-03-12T20:15:30Z | |
| date available | 2020-03-12T20:15:30Z | |
| date issued | 2014 | |
| identifier other | 6859861.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1007824?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Quartz-based vibrating MEMS fabricated using a wafer-bonding process with sealed cavities | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8129568 | |
| subject keywords | Green products | |
| subject keywords | Laser radar | |
| subject keywords | Mobile robots | |
| subject keywords | Navigation | |
| subject keywords | Sensors | |
| subject keywords | Turning | |
| subject keywords | Vehicles | |
| subject keywords | autonomous navigation | |
| subject keywords | path finding | |
| subject keywords | variable speed | |
| identifier doi | 10.1109/MILCOM.2014.207 | |
| journal title | requency Control Symposium (FCS), 2014 IEEE International | |
| filesize | 570842 | |
| citations | 0 | |
| contributor rawauthor | Grousset, S. , Lavenus, P. , Benaissa, L. , Taibi, R. , Augendre, E. , Signamarcheix, T. , Le Traon, O. , Ballandras, S. |