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Development and verification of 2D dynamic electromechanical coupling solver for micro-electrostatic-actuator applications

Type: Journal Paper

Author : Kuo-Shen Chen; Kuang-Shun Ou

Publisher: Elsevier Science

Year: 2007

Pull-in Voltage Estimation of Microcantilever Beams With Effects of Residual Stress Gradients and Capacitance Fringing

Type: Journal Paper

Author : Kuang-Shun Ou; Kuo-Shen Chen

Publisher: IEEE

Year: 2014

Electromagnets calibration utilizing the pull-in instability

Type: Journal Paper

Author : Kuo-Shen Chen; Cheng-Chung Ho

Year: 2004

Modeling of chemical mechanical polishing processes by cellular automata and finite element/matlab integration methods

Type: Journal Paper

Author : Kuo-Shen Chen; Shang-Lun Wu; Hsiu-Ming Yeh

Year: 2014

Author

Kuo-Shen Chen (4)

Kuang-Shun Ou (2)

Cheng-Chung Ho (1)

Hsiu-Ming Yeh (1)

Shang-Lun Wu (1)

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Elsevier Science (1)

IEEE (1)

Year

2014 (2)

2007 (1)

2004 (1)

Keywords

Atmospheric modeling (1)

beams (structures) (1)

cantilevers (1)

capacitance fringing (1)

electrostatic fringing (1)

Electrostatics (1)

energy approach (1)

Energy method (1)

Finite element analysis (1)

finite element analysis (1)

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Journal Paper (4)

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English (4)

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Fulltext (3)

Metadata Only (1)

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Device and Materials Reliability, IEEE Transactions on (1)

Microsystem Technologies (1)

Sensors and Actuators A: Physical (1)

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