FDC R2R variation monitoring for sensor level diagnosis in tool condition hierarchy
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: 2014شناسه الکترونیک: 10.1109/ICITCS.2014.7021751
کلیدواژه(گان): Accuracy,Biological neural networks,Classification algorithms,Feature extraction,Noise,Principal component analysis,Ultra wideband radar
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FDC R2R variation monitoring for sensor level diagnosis in tool condition hierarchy
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contributor author | Blue, J. , Roussy, A. , Pinaton, J. | |
date accessioned | 2020-03-12T20:01:47Z | |
date available | 2020-03-12T20:01:47Z | |
date issued | 2014 | |
identifier other | 6846984.pdf | |
identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/999143 | |
format | general | |
language | English | |
publisher | IEEE | |
title | FDC R2R variation monitoring for sensor level diagnosis in tool condition hierarchy | |
type | Conference Paper | |
contenttype | Metadata Only | |
identifier padid | 8119439 | |
subject keywords | Accuracy | |
subject keywords | Biological neural networks | |
subject keywords | Classification algorithms | |
subject keywords | Feature extraction | |
subject keywords | Noise | |
subject keywords | Principal component analysis | |
subject keywords | Ultra wideband radar | |
identifier doi | 10.1109/ICITCS.2014.7021751 | |
journal title | dvanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI | |
filesize | 695966 | |
citations | 0 |