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date accessioned2020-03-12T20:01:37Z
date available2020-03-12T20:01:37Z
date issued2014
identifier other6846872.pdf
identifier urihttp://libsearch.um.ac.ir:80/fum/handle/fum/999034?locale-attribute=fa&show=full
formatgeneral
languageEnglish
publisherIEEE
titleDevelop an integrated patent quality matrix for investigating the competitive features among multiple competitive patent pools
typeConference Paper
contenttypeMetadata Only
identifier padid8119317
subject keywordscapacitive sensors
subject keywordsmembranes
subject keywordsmicrofabrication
subject keywordsmicrosensors
subject keywordspressure measurement
subject keywordspressure sensors
subject keywordssputter etching
subject keywordstyres
subject keywordsDRlE
subject keywordsTPMS
subject keywordsfabrication process
subject keywordsfixed spherical cap electrode
subject keywordshole shape structure
subject keywordslinear capacitive MEMS pressure sensor
subject keywordsmultiple layered membrane
subject keywordspressure 100 kPa to 800 kPa
subject keywordstire pressure monitoring system
subject keywordstouch process
subject keywordsAbstracts
subject keywordsElectrodes
subject keywordsMicromechanical devices
subject keywordsMonitoring
subject keywordsPiezoresistance
subject keywordsSilicon
subject keywordsSoftware
identifier doi10.1109/ICSICT.2014.7021637
journal titleomputer Supported Cooperative Work in Design (CSCWD), Proceedings of the 2014 IEEE 18th Internationa
filesize224026
citations0
contributor rawauthorYu-Hui Wang , Trappey, A.J.C. , Liu, B.P. , Tsai-chieh Hsu


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