International workshop on open and original problems in software language engineering
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: 2014DOI: 10.1109/ICGCCEE.2014.6922340
Keyword(s): II-VI semiconductors,acoustic measurement,diaphragms,dielectric thin films,displacement measurement,mechanical strength,microsensors,pressure sensors,semiconductor thin films,wide band gap semiconductors,zinc compounds,Intellisuite,MEMS acoustic sensors,SiO<,sub>,2<,/sub>,ZnO,acoustic displacement sensor chips,diaphragm thickness,dielectric layer,mechanical strength,single crystalline silicon,sound pressure level,stress distributions,zinc oxide thin film,Acoustic
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International workshop on open and original problems in software language engineering
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| contributor author | Bagge, A.H. , Zaytsev, V. | |
| date accessioned | 2020-03-12T19:31:20Z | |
| date available | 2020-03-12T19:31:20Z | |
| date issued | 2014 | |
| identifier other | 6747223.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/980519?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | International workshop on open and original problems in software language engineering | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8094849 | |
| subject keywords | II-VI semiconductors | |
| subject keywords | acoustic measurement | |
| subject keywords | diaphragms | |
| subject keywords | dielectric thin films | |
| subject keywords | displacement measurement | |
| subject keywords | mechanical strength | |
| subject keywords | microsensors | |
| subject keywords | pressure sensors | |
| subject keywords | semiconductor thin films | |
| subject keywords | wide band gap semiconductors | |
| subject keywords | zinc compounds | |
| subject keywords | Intellisuite | |
| subject keywords | MEMS acoustic sensors | |
| subject keywords | SiO< | |
| subject keywords | sub> | |
| subject keywords | 2< | |
| subject keywords | /sub> | |
| subject keywords | ZnO | |
| subject keywords | acoustic displacement sensor chips | |
| subject keywords | diaphragm thickness | |
| subject keywords | dielectric layer | |
| subject keywords | mechanical strength | |
| subject keywords | single crystalline silicon | |
| subject keywords | sound pressure level | |
| subject keywords | stress distributions | |
| subject keywords | zinc oxide thin film | |
| subject keywords | Acoustic | |
| identifier doi | 10.1109/ICGCCEE.2014.6922340 | |
| journal title | oftware Maintenance, Reengineering and Reverse Engineering (CSMR-WCRE), 2014 Software Evolution Week | |
| filesize | 123508 | |
| citations | 0 |