Design Assessments of a Rectangular DC Magnetron Sputter for Extended Target Life and Faster Sputtering
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Year
: 2014DOI: 10.1109/TMAG.2013.2278836
Keyword(s): magnetic fields,sputtering,wear,Taguchi method,active compensation magnetizations,argon electrons,design assessments,extended target life,magnetic fields,passive iron annulus,racetrack erosion patterns,rectangular DC magnetron sputter,sputtering,target erosion patterns,vacuum chamber,Argon,Iron,Magnetic domains,Magnetic hysteresis,Sputtering,Substrates,Trajectory,DC magnetron sputter (MS),erosion pattern,magnetic field,operational trajectory
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Design Assessments of a Rectangular DC Magnetron Sputter for Extended Target Life and Faster Sputtering
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| contributor author | Cheng-Tsung Liu | |
| contributor author | Hsiao-Chun Yeh | |
| contributor author | He-Yu Chung | |
| contributor author | Chang-Chou Hwang | |
| date accessioned | 2020-03-12T18:37:43Z | |
| date available | 2020-03-12T18:37:43Z | |
| date issued | 2014 | |
| identifier issn | 0018-9464 | |
| identifier other | 6692979.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/964868 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Design Assessments of a Rectangular DC Magnetron Sputter for Extended Target Life and Faster Sputtering | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 7998443 | |
| subject keywords | magnetic fields | |
| subject keywords | sputtering | |
| subject keywords | wear | |
| subject keywords | Taguchi method | |
| subject keywords | active compensation magnetizations | |
| subject keywords | argon electrons | |
| subject keywords | design assessments | |
| subject keywords | extended target life | |
| subject keywords | magnetic fields | |
| subject keywords | passive iron annulus | |
| subject keywords | racetrack erosion patterns | |
| subject keywords | rectangular DC magnetron sputter | |
| subject keywords | sputtering | |
| subject keywords | target erosion patterns | |
| subject keywords | vacuum chamber | |
| subject keywords | Argon | |
| subject keywords | Iron | |
| subject keywords | Magnetic domains | |
| subject keywords | Magnetic hysteresis | |
| subject keywords | Sputtering | |
| subject keywords | Substrates | |
| subject keywords | Trajectory | |
| subject keywords | DC magnetron sputter (MS) | |
| subject keywords | erosion pattern | |
| subject keywords | magnetic field | |
| subject keywords | operational trajectory | |
| identifier doi | 10.1109/TMAG.2013.2278836 | |
| journal title | Magnetics, IEEE Transactions on | |
| journal volume | 50 | |
| journal issue | 1 | |
| filesize | 948729 | |
| citations | 0 |