Performance of Electro-Thermally Driven <formula formulatype="inline"> <img src="/images/tex/20489.gif" alt="{\\rm VO}_{2}"> </formula>-Based MEMS Actuators
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: 2014DOI: 10.1109/JMEMS.2013.2271774
Keyword(s): finite element analysis,microactuators,phase transformations,vanadium compounds,MEMS actuator device,VO<,sub>,2<,/sub>,conductive heat loss,drastic mechanical displacements,electrothermally driven MEMS actuators,finite element model,frequency 29 Hz,resistive heaters,size 200 mum,size 300 mum,structural phase transition,thin film phase transition,time dependent current pulses,Actuators,Atmospheric modeling,Crystals,Finite element analysis,Heating,Micromechanical dev
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Performance of Electro-Thermally Driven <formula formulatype="inline"> <img src="/images/tex/20489.gif" alt="{\\rm VO}_{2}"> </formula>-Based MEMS Actuators
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| contributor author | Cabrera, Rafmag | |
| contributor author | Merced, Emmanuelle | |
| contributor author | Sepulveda, Nelson | |
| date accessioned | 2020-03-12T18:25:20Z | |
| date available | 2020-03-12T18:25:20Z | |
| date issued | 2014 | |
| identifier issn | 1057-7157 | |
| identifier other | 6560383.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/957947 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Performance of Electro-Thermally Driven <formula formulatype="inline"> <img src="/images/tex/20489.gif" alt="{\\rm VO}_{2}"> </formula>-Based MEMS Actuators | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 7990337 | |
| subject keywords | finite element analysis | |
| subject keywords | microactuators | |
| subject keywords | phase transformations | |
| subject keywords | vanadium compounds | |
| subject keywords | MEMS actuator device | |
| subject keywords | VO< | |
| subject keywords | sub> | |
| subject keywords | 2< | |
| subject keywords | /sub> | |
| subject keywords | conductive heat loss | |
| subject keywords | drastic mechanical displacements | |
| subject keywords | electrothermally driven MEMS actuators | |
| subject keywords | finite element model | |
| subject keywords | frequency 29 Hz | |
| subject keywords | resistive heaters | |
| subject keywords | size 200 mum | |
| subject keywords | size 300 mum | |
| subject keywords | structural phase transition | |
| subject keywords | thin film phase transition | |
| subject keywords | time dependent current pulses | |
| subject keywords | Actuators | |
| subject keywords | Atmospheric modeling | |
| subject keywords | Crystals | |
| subject keywords | Finite element analysis | |
| subject keywords | Heating | |
| subject keywords | Micromechanical dev | |
| identifier doi | 10.1109/JMEMS.2013.2271774 | |
| journal title | Microelectromechanical Systems, Journal of | |
| journal volume | 23 | |
| journal issue | 1 | |
| filesize | 3210066 | |
| citations | 0 |