| contributor author | L F Thompson | |
| contributor author | C G Willson | |
| contributor author | M J Bowden | |
| contributor author | American Chemical Society. Meeting (eds.) | |
| date accessioned | 2020-04-21T19:33:32Z | |
| date available | 2020-04-21T19:33:32Z | |
| date copyright | 1983 | |
| identifier isbn | 0841207755,9780841207752 | |
| identifier other | /pad-books/801000-900000/872000/568d45badbfd8ff1949f4afaa9187815.djvu | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/3031909?locale-attribute=fa | |
| format mimetype | application/djvu | |
| language | English | |
| publisher | American Chemical Society | |
| title | Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983 | |
| type | Ebook | |
| contenttype | Fulltext | |
| identifier padid | 934377 | |
| coverage | general | |
| pages | 364 | |
| filesize | 5036192 | |
| identifier link | https://pad.um.ac.ir/file/view/934377 | |
| series | ACS symposium series, 219 | |
| contributor rawauthor | American Chemical Society. Division of Organic Coatings and Plastics Chemistry. | |
