Accurate Determination of Pull-in Voltage for MEMS Capacitive Devices with Clamped Square Diaphragm
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DOI: null
Keyword(s): MEMS,Capacitive Device,Pull-in Voltage,Diaphragm Deformation
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Accurate Determination of Pull-in Voltage for MEMS Capacitive Devices with Clamped Square Diaphragm
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| contributor author | ganji, b.a; mousavi, a | |
| date accessioned | 2020-04-11T15:16:45Z | |
| date available | 2020-04-11T15:16:45Z | |
| identifier other | Der_H6QjRRG8M4ALMctwDR2K39HPDhzHmSjJX7MUerW2Xu8JQX.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/2346714?locale-attribute=en | |
| format | general | |
| language | Farsi | |
| title | Accurate Determination of Pull-in Voltage for MEMS Capacitive Devices with Clamped Square Diaphragm | |
| type | Conference Paper | |
| contenttype | Fulltext | |
| identifier padid | 4403903 | |
| subject keywords | MEMS,Capacitive Device,Pull-in Voltage,Diaphragm Deformation | |
| identifier doi | null | |
| coverage | Academic | |
| filesize | 876113 | |
| citations | 1 | |
| identifier link | http://www.civilica.com/Paper-JR_IJE-JR_IJE-25-3_012.html |