Design and control of a long-traveling nano-positioning stage
Year
: 2010DOI: 10.1016/j.precisioneng.2010.01.003
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Design and control of a long-traveling nano-positioning stage
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| contributor author | Chien-Hung Liu | |
| contributor author | Wen-Yuh Jywe | |
| contributor author | Yeau-Ren Jeng | |
| contributor author | Tung-Hui Hsu | |
| contributor author | Yi-tsung Li | |
| date accessioned | 2020-03-15T07:59:49Z | |
| date available | 2020-03-15T07:59:49Z | |
| date issued | 2010 | |
| identifier other | VkIfFCeOyb4bJFGjQEMaMlaaWn098Q_CI00AkaDJgvHqEtSquq.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1887216?locale-attribute=en | |
| format | general | |
| language | English | |
| title | Design and control of a long-traveling nano-positioning stage | |
| type | Journal Paper | |
| contenttype | Fulltext | |
| contenttype | Fulltext | |
| identifier padid | 13236540 | |
| identifier doi | 10.1016/j.precisioneng.2010.01.003 | |
| coverage | Academic | |
| pages | 497-506 | |
| journal volume | 34 | |
| journal issue | 3 | |
| filesize | 3597402 | |
| citations | 0 |