Dust Hour Glass in a Capacitive RF Discharge
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, , , , , , , , , , ,Publisher:
Year
: 2014DOI: 10.1109/TPS.2014.2343975
Keyword(s): dusty plasmas,high-frequency discharges,plasma sheaths,plasma transport processes,capacitively coupled radio frequencydischarge,dust hour glass,dust particle cyclic transport,electrical asymmetry discharge,horizontal electrodes,plasma bulk,Discharges (electric),Electrodes,Fault location,Glass,Harmonic analysis,Plasmas,Dusty plasmas,plasma sheaths,radio frequency
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Dust Hour Glass in a Capacitive RF Discharge
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| contributor author | Iwashita, S. | |
| contributor author | Schü | |
| contributor author | ngel, Edmund | |
| contributor author | Schulze, J. | |
| contributor author | Hartmann, Peter | |
| contributor author | Donkó | |
| contributor author | , Zoltá | |
| contributor author | n | |
| contributor author | Uchida, Giichiro | |
| contributor author | Koga, Kazuya | |
| contributor author | Shiratani, Masaharu | |
| contributor author | Czarnetzki, U. | |
| date accessioned | 2020-03-13T00:19:21Z | |
| date available | 2020-03-13T00:19:21Z | |
| date issued | 2014 | |
| identifier issn | 0093-3813 | |
| identifier other | 6880766.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1142439?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Dust Hour Glass in a Capacitive RF Discharge | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8324971 | |
| subject keywords | dusty plasmas | |
| subject keywords | high-frequency discharges | |
| subject keywords | plasma sheaths | |
| subject keywords | plasma transport processes | |
| subject keywords | capacitively coupled radio frequencydischarge | |
| subject keywords | dust hour glass | |
| subject keywords | dust particle cyclic transport | |
| subject keywords | electrical asymmetry discharge | |
| subject keywords | horizontal electrodes | |
| subject keywords | plasma bulk | |
| subject keywords | Discharges (electric) | |
| subject keywords | Electrodes | |
| subject keywords | Fault location | |
| subject keywords | Glass | |
| subject keywords | Harmonic analysis | |
| subject keywords | Plasmas | |
| subject keywords | Dusty plasmas | |
| subject keywords | plasma sheaths | |
| subject keywords | radio frequency | |
| identifier doi | 10.1109/TPS.2014.2343975 | |
| journal title | Plasma Science, IEEE Transactions on | |
| journal volume | 42 | |
| journal issue | 10 | |
| filesize | 304808 | |
| citations | 0 |