Unusual Cathode Erosion Patterns Observed for Steered Arc Sources
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Year
: 2014DOI: 10.1109/TPS.2014.2328333
Keyword(s): arcs (electric),argon,cathodes,erosion,gas mixtures,oxygen,plasma diagnostics,plasma sources,Ar-O<,sub>,2<,/sub>,argon-oxygen mixture,cathode erosion patterns,cathodic arc source,cathodic arc spot,linear macroparticle filter,magnetron-type magnetic field,periodic groves,periodic ridges,plasma distributions,pressure 0.5 Pa,pure argon background,steered arc sources,Argon,Cathodes,Ignition,Plasmas,Surface impedance,Surface treatment,Vacuum arcs,Arc discharges,c
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Unusual Cathode Erosion Patterns Observed for Steered Arc Sources
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| contributor author | Kolbeck, Jonathan | |
| contributor author | Anders, Andre | |
| date accessioned | 2020-03-13T00:10:05Z | |
| date available | 2020-03-13T00:10:05Z | |
| date issued | 2014 | |
| identifier issn | 0093-3813 | |
| identifier other | 6840333.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1136824?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Unusual Cathode Erosion Patterns Observed for Steered Arc Sources | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8318596 | |
| subject keywords | arcs (electric) | |
| subject keywords | argon | |
| subject keywords | cathodes | |
| subject keywords | erosion | |
| subject keywords | gas mixtures | |
| subject keywords | oxygen | |
| subject keywords | plasma diagnostics | |
| subject keywords | plasma sources | |
| subject keywords | Ar-O< | |
| subject keywords | sub> | |
| subject keywords | 2< | |
| subject keywords | /sub> | |
| subject keywords | argon-oxygen mixture | |
| subject keywords | cathode erosion patterns | |
| subject keywords | cathodic arc source | |
| subject keywords | cathodic arc spot | |
| subject keywords | linear macroparticle filter | |
| subject keywords | magnetron-type magnetic field | |
| subject keywords | periodic groves | |
| subject keywords | periodic ridges | |
| subject keywords | plasma distributions | |
| subject keywords | pressure 0.5 Pa | |
| subject keywords | pure argon background | |
| subject keywords | steered arc sources | |
| subject keywords | Argon | |
| subject keywords | Cathodes | |
| subject keywords | Ignition | |
| subject keywords | Plasmas | |
| subject keywords | Surface impedance | |
| subject keywords | Surface treatment | |
| subject keywords | Vacuum arcs | |
| subject keywords | Arc discharges | |
| subject keywords | c | |
| identifier doi | 10.1109/TPS.2014.2328333 | |
| journal title | Plasma Science, IEEE Transactions on | |
| journal volume | 42 | |
| journal issue | 10 | |
| filesize | 1155461 | |
| citations | 0 |