Long-Term Effects of Relative Humidity on the Performance of ZnO-Based MEMS Acoustic Sensors
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: 2014DOI: 10.1109/TDMR.2014.2317415
Keyword(s): etching,micromachining,microsensors,passivation,plasma CVD,Al,MEMS acoustic sensors,PECVD layer,PECVD silicon dioxide,Si,ZnO,acoustic sensor chip,aluminum electrodes,bulk micromachining technique,dissipation factor,etching,fabrication process,frequency response,humid environment conditions,passivating layer,relative humidity,sensitivity response,silicon diaphragm,size 0.3 mum,size 25 mum,weak acid,Acoustic measurements,Acoustic sensors,Capacitance,Etching,Humidity
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Long-Term Effects of Relative Humidity on the Performance of ZnO-Based MEMS Acoustic Sensors
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| contributor author | Prasad, M. | |
| contributor author | Sahula, Vineet | |
| contributor author | Khanna, Vinod Kumar | |
| date accessioned | 2020-03-12T23:58:26Z | |
| date available | 2020-03-12T23:58:26Z | |
| date issued | 2014 | |
| identifier issn | 1530-4388 | |
| identifier other | 6798753.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1129957?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Long-Term Effects of Relative Humidity on the Performance of ZnO-Based MEMS Acoustic Sensors | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8310381 | |
| subject keywords | etching | |
| subject keywords | micromachining | |
| subject keywords | microsensors | |
| subject keywords | passivation | |
| subject keywords | plasma CVD | |
| subject keywords | Al | |
| subject keywords | MEMS acoustic sensors | |
| subject keywords | PECVD layer | |
| subject keywords | PECVD silicon dioxide | |
| subject keywords | Si | |
| subject keywords | ZnO | |
| subject keywords | acoustic sensor chip | |
| subject keywords | aluminum electrodes | |
| subject keywords | bulk micromachining technique | |
| subject keywords | dissipation factor | |
| subject keywords | etching | |
| subject keywords | fabrication process | |
| subject keywords | frequency response | |
| subject keywords | humid environment conditions | |
| subject keywords | passivating layer | |
| subject keywords | relative humidity | |
| subject keywords | sensitivity response | |
| subject keywords | silicon diaphragm | |
| subject keywords | size 0.3 mum | |
| subject keywords | size 25 mum | |
| subject keywords | weak acid | |
| subject keywords | Acoustic measurements | |
| subject keywords | Acoustic sensors | |
| subject keywords | Capacitance | |
| subject keywords | Etching | |
| subject keywords | Humidity | |
| identifier doi | 10.1109/TDMR.2014.2317415 | |
| journal title | Device and Materials Reliability, IEEE Transactions on | |
| journal volume | 14 | |
| journal issue | 2 | |
| filesize | 544761 | |
| citations | 0 |