Establishment of RF attenuation standard in the frequency range of 30 GHz to 50 GHz at NMIJ
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: 2014DOI: 10.1109/APEDE.2014.6958273
Keyword(s): Aluminum,Chemical vapor deposition,Degradation,Materials,Metallization,Microelectronics,Reliability
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Establishment of RF attenuation standard in the frequency range of 30 GHz to 50 GHz at NMIJ
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| contributor author | Widarta, Anton , Katou, Yuuto | |
| date accessioned | 2020-03-12T23:33:11Z | |
| date available | 2020-03-12T23:33:11Z | |
| date issued | 2014 | |
| identifier other | 6898474.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1115783?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Establishment of RF attenuation standard in the frequency range of 30 GHz to 50 GHz at NMIJ | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8285276 | |
| subject keywords | Aluminum | |
| subject keywords | Chemical vapor deposition | |
| subject keywords | Degradation | |
| subject keywords | Materials | |
| subject keywords | Metallization | |
| subject keywords | Microelectronics | |
| subject keywords | Reliability | |
| identifier doi | 10.1109/APEDE.2014.6958273 | |
| journal title | recision Electromagnetic Measurements (CPEM 2014), 2014 Conference on | |
| filesize | 382922 | |
| citations | 0 |