Time-variant chemical plume tracing inspired by the silk moth
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Year
: 2014DOI: 10.1109/IPFA.2014.6898144
Keyword(s): focused ion beam technology,n gallium,n integrated circuit manufacture,n integrated circuit reliability,n ion beams,n sputter etching,n xenon,n Ga,n advanced process technologies,n beam sensitive materials,n focused ion beam technology,n ion beams,n localized FIB delayering,n Chemistry,n Copper,n Dielectrics,n Failure analysis,n Materials,n Milling
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Time-variant chemical plume tracing inspired by the silk moth
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| contributor author | Jouh Yeong Chew | |
| contributor author | Shunsuke, S. | |
| contributor author | Kurabayashi, D. | |
| date accessioned | 2020-03-12T22:38:24Z | |
| date available | 2020-03-12T22:38:24Z | |
| date issued | 2014 | |
| identifier other | 7017684.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1089612?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Time-variant chemical plume tracing inspired by the silk moth | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8227864 | |
| subject keywords | focused ion beam technology | |
| subject keywords | n gallium | |
| subject keywords | n integrated circuit manufacture | |
| subject keywords | n integrated circuit reliability | |
| subject keywords | n ion beams | |
| subject keywords | n sputter etching | |
| subject keywords | n xenon | |
| subject keywords | n Ga | |
| subject keywords | n advanced process technologies | |
| subject keywords | n beam sensitive materials | |
| subject keywords | n focused ion beam technology | |
| subject keywords | n ion beams | |
| subject keywords | n localized FIB delayering | |
| subject keywords | n Chemistry | |
| subject keywords | n Copper | |
| subject keywords | n Dielectrics | |
| subject keywords | n Failure analysis | |
| subject keywords | n Materials | |
| subject keywords | n Milling | |
| identifier doi | 10.1109/IPFA.2014.6898144 | |
| journal title | afety, Security, and Rescue Robotics (SSRR), 2014 IEEE International Symposium on | |
| filesize | 502740 | |
| citations | 0 |