A novel pad conditioner and pad roughness effects on tungsten CMP
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Year
: 2014DOI: 10.1109/ECTC.2014.6897466
Keyword(s): carbon nanotubes,n electroless deposited coatings,n nanocomposites,n nanofabrication,n nickel compounds,n oxidation,n scanning electron microscopy,n surface morphology,n surface treatment,n surfactants,n suspensions,n transmission electron microscopy,n ultrasonic applications,n C-NiP,n SEM,n TEM,n acid oxidation treatment,n carbon nanotube clusters,n chemical modification,n composite coatings,n electroless coatings,n electroless depo
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A novel pad conditioner and pad roughness effects on tungsten CMP
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| contributor author | Donghyun Lim | |
| contributor author | Hojoong Kim | |
| contributor author | Bongyoung Jang | |
| contributor author | Honglae Cho | |
| contributor author | Junyong Kim | |
| contributor author | Hasub Hwang | |
| date accessioned | 2020-03-12T22:38:03Z | |
| date available | 2020-03-12T22:38:03Z | |
| date issued | 2014 | |
| identifier other | 7017318.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1089424?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | A novel pad conditioner and pad roughness effects on tungsten CMP | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8227636 | |
| subject keywords | carbon nanotubes | |
| subject keywords | n electroless deposited coatings | |
| subject keywords | n nanocomposites | |
| subject keywords | n nanofabrication | |
| subject keywords | n nickel compounds | |
| subject keywords | n oxidation | |
| subject keywords | n scanning electron microscopy | |
| subject keywords | n surface morphology | |
| subject keywords | n surface treatment | |
| subject keywords | n surfactants | |
| subject keywords | n suspensions | |
| subject keywords | n transmission electron microscopy | |
| subject keywords | n ultrasonic applications | |
| subject keywords | n C-NiP | |
| subject keywords | n SEM | |
| subject keywords | n TEM | |
| subject keywords | n acid oxidation treatment | |
| subject keywords | n carbon nanotube clusters | |
| subject keywords | n chemical modification | |
| subject keywords | n composite coatings | |
| subject keywords | n electroless coatings | |
| subject keywords | n electroless depo | |
| identifier doi | 10.1109/ECTC.2014.6897466 | |
| journal title | lanarization/CMP Technology (ICPT), 2014 International Conference on | |
| filesize | 389116 | |
| citations | 0 |