Organizers
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Year
: 2014DOI: 10.1109/VLSIT.2014.6894409
Keyword(s): CMOS integrated circuits,n MOSFET,n amorphisation,n contact resistance,n elemental semiconductors,n germanium,n laser beam annealing,n nickel compounds,n CAE techniques,n Ge,n Ge preamorphization implant,n ITRS 2015 HP nFinFET,n NMOS,n NiGe,n PAI,n PMOS,n carrier activation enhancement techniques,n in-situ contact process,n laser anneal,n saturation drive current,n ultra-low NiGe specific contact resistivities,n Annealing,n Comput
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Organizers
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| date accessioned | 2020-03-12T22:33:32Z | |
| date available | 2020-03-12T22:33:32Z | |
| date issued | 2014 | |
| identifier other | 7014648.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1086985?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Organizers | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8224746 | |
| subject keywords | CMOS integrated circuits | |
| subject keywords | n MOSFET | |
| subject keywords | n amorphisation | |
| subject keywords | n contact resistance | |
| subject keywords | n elemental semiconductors | |
| subject keywords | n germanium | |
| subject keywords | n laser beam annealing | |
| subject keywords | n nickel compounds | |
| subject keywords | n CAE techniques | |
| subject keywords | n Ge | |
| subject keywords | n Ge preamorphization implant | |
| subject keywords | n ITRS 2015 HP nFinFET | |
| subject keywords | n NMOS | |
| subject keywords | n NiGe | |
| subject keywords | n PAI | |
| subject keywords | n PMOS | |
| subject keywords | n carrier activation enhancement techniques | |
| subject keywords | n in-situ contact process | |
| subject keywords | n laser anneal | |
| subject keywords | n saturation drive current | |
| subject keywords | n ultra-low NiGe specific contact resistivities | |
| subject keywords | n Annealing | |
| subject keywords | n Comput | |
| identifier doi | 10.1109/VLSIT.2014.6894409 | |
| journal title | eliability, Infocom Technologies and Optimization (ICRITO) (Trends and Future Directions), 2014 3rd | |
| filesize | 205441 | |
| citations | 0 |