One possibility for the synthesis of autonom Petri Nets
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: 2014DOI: 10.1109/ICMTS.2014.6841475
Keyword(s): Young',s modulus,n dielectric thin films,n internal stresses,n micromechanical devices,n photoresists,n strain measurement,n MEMS devices,n SU-8 films,n SU-8 negative epoxy,n Young',s modulus,n automated wafer mapping,n dielectric films,n dielectric layer,n parylene-C,n photoresist,n post-processing thermal treatment,n processing temperatures,n residual stress,n rotating pointer arm test structures,n strain measurements,n struct
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One possibility for the synthesis of autonom Petri Nets
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| contributor author | Leca, Mihai | |
| date accessioned | 2020-03-12T21:59:45Z | |
| date available | 2020-03-12T21:59:45Z | |
| date issued | 2014 | |
| identifier other | 6969990.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1067769?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | One possibility for the synthesis of autonom Petri Nets | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8202599 | |
| subject keywords | Young' | |
| subject keywords | s modulus | |
| subject keywords | n dielectric thin films | |
| subject keywords | n internal stresses | |
| subject keywords | n micromechanical devices | |
| subject keywords | n photoresists | |
| subject keywords | n strain measurement | |
| subject keywords | n MEMS devices | |
| subject keywords | n SU-8 films | |
| subject keywords | n SU-8 negative epoxy | |
| subject keywords | n Young' | |
| subject keywords | s modulus | |
| subject keywords | n automated wafer mapping | |
| subject keywords | n dielectric films | |
| subject keywords | n dielectric layer | |
| subject keywords | n parylene-C | |
| subject keywords | n photoresist | |
| subject keywords | n post-processing thermal treatment | |
| subject keywords | n processing temperatures | |
| subject keywords | n residual stress | |
| subject keywords | n rotating pointer arm test structures | |
| subject keywords | n strain measurements | |
| subject keywords | n struct | |
| identifier doi | 10.1109/ICMTS.2014.6841475 | |
| journal title | lectrical and Power Engineering (EPE), 2014 International Conference and Exposition on | |
| filesize | 695020 | |
| citations | 0 |